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Fast Entry Load Lock

Product code: KS40

The KS40 is an ultra-compact load lock chamber with O-ring sealed quick access door. A DN16CF port is integrated in the door. A rotatable DN40CF transfer flange normally connects to a gate valve. Three additional ports are provided:

  • pumping port DN40CF, rotateable, tapped M6
  • vacuum gauge port DN40CF, rotateable, tapped M6
  • viewport flange DN40CF, fixed, tapped M6
Order code:
  • KS40 load lock chamber
customized versions:
  • flange positions and number of ports can be altered on request.

The KS40 can be supplied with a DN40CF gate valve, ion gauge, view port, and turbo molecular pump.

Specifications: Fast Entry Load Lock

  • Bakeout temperature 150°C
  • He leak rate < 1x10-9 mbar*l/s
  • Body and flanges St 1.4301 (AISI 304L)

download drawing dimensions
download drawing port arrangement

Ferrovac Gmbh | Thurgauerstrasse 72 | CH-8050 Zürich | | | TEL +41 44 273 16 38 | FAX +41 44 273 16 30
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