Sign in

Dual Shaft Wafer Transporter with vertical lift

Product code: RMD40(FL)-XXXX-YYYY-FRKLIFT

The shown configuration is a typical application in semiconductor industry. While the linear motion of the magnet transmits the axial movement, the rotary motion elevates and lowers the wafer. The FRKLIFT is only one of several possible interfaces. It features four M4 threads to fix a customer specific wafer support, for diameters up to 300mm. Feel free to request a customized interface tailored to your needs.
 

Order code standard length
  • 300mm travel: RMD40-0300-0215-FRKLIFT
  • 500mm travel: RMD40-0500-0215-FRKLIFT
  • 750mm travel: RMD40-0750-0215-FRKLIFT
  • 1000mm travel: RMD40-1000-0215-FRKLIFT

Order code customized version:
  • RMD40-XXX-YYY-FRKLIFT
XXX: linear travel in millimeters
YYY: retracted length, flange face to end of the elevator in millimeters (min. 215mm)

 


Specifications: Dual Shaft Wafer Transporter with vertical lift

Ferrovac Gmbh | Thurgauerstrasse 72 | CH-8050 Zürich | www.ferrovac.com | sales@ferrovac.com | TEL +41 44 273 16 38 | FAX +41 44 273 16 30
© Ferrovac GmbH 2017 | © vogy GmbH 2017