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Wafer Handling and Lifting Device

Product code: FRKLIFT

Converting the rotation of the outer magnet of an RMJG or RMDG dual shaft sample transporter to a vertical shift, the FRKLIFT accessory is ideal to pick a wafer up, transfer it linearly to another position and safely park it by gently lowering the fork.

FRKLIFT is compatible with RMJ and RMD dual shaft sample transporters.

Please contact us for detailed information about forks and wafer dimension.

Specifications: Wafer Handling and Lifting Device

adds 2.0 to dimension Y of the main product

  • bakeout temperature: 200 °C max.
  • fully UHV compatible materials
  • lift travel: +/- 7.5mm
  • compatible with RMJ and RMD dual shaft sample transporters
  • bespoken holders for different wafer sizes

Downloads:

Datasheet (pdf)    Drawing (pdf)

Ferrovac AG | Thurgauerstrasse 72 | CH-8050 Zürich | www.ferrovac.com | sales@ferrovac.com | TEL +41 44 273 16 38 | FAX +41 44 273 16 30
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