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Boomerax XY Stage DN63 with +-12.5mm travel

Product code: MXY63CF63TCF40TXY12

The Boomerax MXY63 module is a versatile, rigid and precise 2 axis positioning stage with a 65mm ID edge welded bellows. Standard versions use large diameter micrometer heads with 20 micron scale and a vernier, allowing a reading of 2 microns. In combination with Boomerax Z  modules and rotary platforms, a complete, XYZR manipulator can be built.

Key features:

  • 2° adjustable tilt of both flanges
  • adjustable mechanical end stops
  • retrofittable motorisation
  • stepper motors
  • limit switches
  • encoders
  • load compensation springs

Specifications: Boomerax XY Stage DN63 with +-12.5mm travel

  • XY travel range: +-12.5mm
  • resolution: 2 micron (if manually driven. Motorized and encoded versions achieve higher resolutions)
  • free bore: 65mm
  • mounting flange: DN63CF (4.5" OD) tapped M8
  • travelling flange: DN40CF (2.75" OD) tapped M6
  • bellows material: 1.4404
  • adjustable tilt: 2°
  • adjustable mechanical end stops
  • bakeout temperature: 150 °C max.
  • pressure range: 1E-11 to 1000 mbar
  • He leak rate: <1E-10 mbar*l/s
  • All vacuum-side components cleaned to UHV standards.
  • Air-side lubrication used on certain parts:
    • Spindle: Motorex Type 3000
    • Screws: CRC Dry Lube F 32602-AA
    • Linear rails: Krytox GPL 225

Downloads: drawing (pdf)  /  3D-model (stp)
 

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