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Pincer for Wafer Handling

Product code: PGRMWAF

Compatible with all Ferrovac Dual Shaft Sample Transporters, this pincer allows for dircet gripping of a wafer from a parking position or from a storage stack. FKM O-rings in the pincer jaws ensure a firm grip while at the same time preventing the wafer from being scratched. The opening/closing of the pincer is done with approximately three-quarter turn of the outer magnet assembly of the sample transporter.

Specifications: Pincer for Wafer Handling

adds 78.0 to dimension Y of the main product

  • materials: Stainless Steel 1.4301 (304L), CuBe2, PEEK and FKM
  • for semiconductor wafers of size: 2" ... 6"
  • with FKM O-rings for a secure grip
  • bakeout temperature: 200 °C max.

Downloads:

Drawing (pdf)

Compatibility

The PGRMWAF Pincer for Wafer Handling suits the following products:

List price:

6'687.50 CHF

6'412.41 EUR*
7'229.73 USD*

Dual Shaft Single Rotary Sample Transporter

Product code: RMD40-XXXX-YYYY

Vacuum-side-all-metal magnetically driven dual shaft sample transporter with independent rotary motion of the inner shaft. Sapphire hybride ball bearings for extra durability and smooth operation are guiding a tubular outer shaft with a square crossection as well as the inner shaft. Recommended for travel ranges >750mm and for heavier loads.


List price:

8'292.50 CHF

7'951.39 EUR*
8'964.86 USD*

Dual Shaft Dual Rotary Sample Transporter

Product code: RMDG40-XXXX-YYYY

Vacuum-side-all-metal dual rotary magnetically driven dual shaft sample transporter with independent rotary motion of both, the inner and outer shafts.
Sapphire hybride ball bearings for extra durability and smooth operation are guiding a tubular outer shaft with a square crossection as well as the inner shaft.


List price:

5'007.60 CHF

4'801.61 EUR*
5'413.62 USD*

Dual Shaft Single Rotary Sample Transporter

Product code: RMJ40-XXXX-YYYY

Extra sturdy magnetically driven dual shaft sample transporter with independent rotary motion of the inner shaft. Slide bearings for extra durability and smooth operation are guiding a tubular outer shaft with a square crossection. Sapphire hybride bearings are guiding the inner shaft. Recommended for travel ranges >750mm and for heavier loads.


List price:

5'914.96 CHF

5'671.65 EUR*
6'394.55 USD*

Dual Shaft Dual Rotary Sample Transporter DN40CF

Product code: RMJG40-XXXX-YYYY

Magnetically driven sample transporter with independent rotary motion of the inner as well as the outer shaft. Slide bearings for linear motion, sapphire hybrid bearings for inner shaft. Throughout guarantee for long-lifetime and smooth operation even after numerous bakeout cycles.


Ferrovac AG | Thurgauerstrasse 72 | CH-8050 Zürich | www.ferrovac.com | sales@ferrovac.com | TEL +41 44 273 16 38 | FAX +41 44 273 16 30
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