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Wafer Lifting Device

Product code: FRKLIFT

The FRKLIFT is an accessory which can be used with the magnetically driven dual shaft sample transporters RMD40. It allows a movement perpendicular to the transfer axis. In semiconductor instustry a typical application is the handling of wafer (slice of semiconductor material). Feel free to request a customized interface for your specific wafer support.
 

RMD40 with FRKLIFT option


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Specifications: Wafer Lifting Device

  • bakeout temperature: 150deg C max.
  • fully UHV compatible materials
  • lift travel: +/- 7.5mm
  • compatible with dual shaft manipulators
  • fork not included
    Download datasheet
    Download drawing

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