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Load Lock Chamber

Product code: KS100

The KS100 is designed for fast entry of samples into a UHV system. Samples are loaded through an O-ring sealed door, usually onto an MD16 magnetically driven linear-rotary feedthrough.
A total of five CF ports is provided:

  • Mounting flange DN100CF, fixed
  • Pumping port DN40CF, rotateable, tapped M6
  • Vacuum gauge port DN40CF, rotateable, tapped M6
  • Viewport flange DN40CF, fixed, tapped M6
  • Transporter port DN16CF, fixed, tapped M4
Order code:
  • KS100 load lock chamber
customized versions:
  • flange positions and number of ports can be altered on request.

On request, the KS100 can be supplied with a DN100CF gate valve, ion gauge, view port, turbo molecular pump and MD16 linear-/rotary feedthrough.

Specifications: Load Lock Chamber

Load lock chamber DN100CF

  • Bakeout temperature 150°C
  • He leak rate < 1x10-9 mbar*l/s
  • Body and flanges St 1.4301 (AISI 304L)

download drawing in pdf format

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