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Fast Entry Load Lock

Product code: KS63

The KS63 is designed for the fast and clean introduction of samples, STM tips or crucibles into a UHV system. Samples are loaded through a O-Ring sealed door at the rear end of the load lock, usually onto a MD16 magnetically driven linear-rotary feedthrough
In addition to the mounting flange DN63CF, a total of three DN40CF ports is provided:

  • Mounting flange DN63CF, rotateable
  • Pumping port DN40CF, rotateable, tapped M6
  • Vacuum gauge port DN40CF, rotateable, tapped M6
  • Viewport flange DN40CF, fixed, tapped M6
  • Transporter port DN16CF, fixed, tapped M4
Order code:
  • KS63 load lock chamber
customized versions:
  • flange positions and number of ports can be altered on request.

On request, the KS63 can be supplied with a DN63CF gate valve, ion gauge, view port, and turbo molecular pump and MD16 linear-/rotary feedthrough.

Specifications: Fast Entry Load Lock

·Bakeout temperature 150°C ·He leak rate < 1x10-9 mbar*l/s ·Fully UHV compatible materials Body and flanges St 1.4301 (AISI 304L) download drawing in pdf format

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