Sign in
HomeProjectsReferencesPrivacy PolicyPublicationsContactManuals
Online catalogue and pricelistUHV Suitcase Docking SystemsUHV SuitcaseWobblestick Manipulators WMPincers and Grippers Wobblestick AccessoriesSample TransportersSample Transporter AccessoriesSample Transporter MotorizationLinear/Rotary FeedthroughsLinear/Rotary AccessoriesLinear/Rotary MotorizationRotary FeedthroughsPort AlignersSample HoldersSample Receivers and -CarriersSample Heating StagesVacuum ChambersCF-Cubes and -ComponentsUHV Suitcase AccessoriesLoad Lock SystemsNEG-ION pumpsLaboratory EquipmentCryo EquipmentMultiaxis Boomerax ManipulatorsXY-ManipulatorsXY-Manipulators AccessoriesZ-ManipulatorsMZ40CF40CF40-0100
Boomerax Z Stage DN40, 100mm travelMZ40CF40CF40-0200
Boomerax Z Stage DN40, 200mm travelMZ63CF63CF63-0100
Boomerax Z Stage DN65, 100mm travelMZ63CF63CF63-0200
Boomerax Z Stage DN65, 200mm travelMZ63CF63CF63-0300
Boomerax Z Stage DN65, 300mm travelMZ63CF63CF63-0500
Boomerax Z Stage DN65, 500mm travelMZ63CF63CF63-0750
Boomerax Z Stage DN65, 750mm travelMZ63CF63CF63-1000
Boomerax Z Stage DN65, 1000mm travel MZ100CF100CF100-0100
Boomerax Z Stage DN100CF, 100mm travelMZ160CF160CF160
Linear Z-Drive DN160CFZ-Manipulator AccessoriesIn-Vacuum Connectors and WiringFastenersBall-Bearings

Boomerax Z Stage DN100CF, 100mm travel

Product code: MZ100CF100CF100-0100

The Boomerax MZ100 Z-drives offer a sturdy yet compact construction for accurate linear motion while their highest quality edge welded bellows fulfil the strictest requirements in terms of leak tightness and durability.
Short as well as long versions of the MZ100 have a continuous free bore, as the supports of their bellows are mounted externally.
Boomerax Z-drives are commonly combined with our Boomerax XY-Manipulators and differentially pumped rotary platforms to form a complete XYZR manipulator.

BOOMERAX_Manipulators_Questionnaire_Ferrovac.pdf

Specifications: Boomerax Z Stage DN100CF, 100mm travel

  • Z travel: 100mm
  • continuous inner free bore, ID: 100mm
  • resolution: 2 micron (if manually driven. Motorized and encoded versions achieve higher resolutions)
    • transmission: 1:2
      • helical/screw gear Unit: 1:1
      • spindle Pitch: 2mm
  • mounting flange: DN100CF with through holes for M6 (other flanges on request)
  • travelling flange: DN100CF with through holes for M6 (other flanges on request)
  • bakeout temperature: 200 °C max.
  • pressure range: 1E-11 to 1000 mbar
  • He leak rate: <1E-10 mbar*l/s

Downloads: manuals 

Note: MZ100 must be supported with a stand if mounted horizontally
download drawing

Options and Accessories

List price:

771.53 CHF

829.96 EUR*
922.66 USD*

Limit Switch Kit for Boomerax Z-Shift Manipulators

Product code: MZLIMELKIT

Electrical limit switches for Z-shift Manipulator. Positions adjustable. Fully bakeable up to 150°C


List price:

on request

Linear Absolute Optical Encoder Kit for Z-Translator CF40, 100mm Scale

Product code: UPGRADEMZ40(+MZENCLAK100)

Absolute, optical linear encoder. Stainless steel scale.


List price:

on request

Weight Support for MZ Manipulators 74N Version (eff. 81N-156N)

Product code: MZS74

For horizontal mounted XYZ-stages


Ferrovac AG | Thurgauerstrasse 72 | CH-8050 Zürich | www.ferrovac.com | link? | TEL +41 44 273 16 38 | FAX +41 44 273 16 30
© Ferrovac AG 2024 | © vogy GmbH 2024