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Boomerax Z Stage with two fixed, outline DN63CF, 500mm travel length

Product code: MZ63CF63CF63-0500

The Boomerax MZ63 Z-drives offer a sturdy yet compact construction for accurate linear motion while their highest quality edge welded bellows fulfil the strictest requirements in terms of leak tightness and durability.
Short as well as long versions of the MZ63 have a continuous free bore, as the supports of their bellows are mounted externally.
Boomerax Z-drives are commonly combined with our Boomerax XY-Manipulators and differentially pumped rotary platforms to form a complete XYZR manipulator.

BOOMERAX_Manipulators_Questionnaire_Ferrovac.pdf


Specifications: Boomerax Z Stage with two fixed, outline DN63CF, 500mm travel length

  • Z travel: 500mm
  • free bore, ID: 65mm
  • resolution: 5 microns (if manually driven. Motorized and encoded versions achieve higher resolutions)
  • mounting flange: DN63CF, with through holes
  • traveling flange: DN63CF, with through holes
  • operation temperature: 150°C
  • pressure range: 1E-11 to 1000 mbar
  • He leak rate: <1E-10 mbar*l/s

Note: For horizontal mounting of MZ modules, a support stand MZS is highly recommended.

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