Boomerax XY Stage DN63
Boomerax XY-Stages
X/Y/Z/R-Manipulators
Products
Home

MXY63CF63TCF__TXY12

Boomerax XY Stage DN63

From

8’900.00 CHF

Highly precise heavy-duty two axis manipulator.

Questions? Connect with an expertBuy at UHV store

  • The Boomerax XY Stage DN63 is available in two different traveling flange options: DN40CF and DN63CF.

    SpecificationMXY63CF63TCF40TXY12MXY63CF63TCF63TXY12
    Travel XY+/- 12.5 mm+/- 12.5 mm
    Bellow ID65 mm65 mm
    Max. Insert OD29 mm29 mm
    Base FlangeDN63CFT (4.5" OD) M8DN63CFT (4.5" OD) M8
    Travel FlangeDN40CFT (2.75"OD) M6DN63CFT (4.5" OD) M8
    Price 8900 CHF8980 CHF

  • Boomerax MXY63 – High-Precision Two-Axis Positioning Stage

    The Boomerax MXY63 is a versatile, heavy-duty, and highly precise two-axis positioning stage, designed for ultra-high vacuum (UHV) applications. Featuring an edge welded bellows unit with an inner diameter of 65 mm, it ensures vacuum integrity while providing smooth and controlled motion for fine positioning tasks.

    Equipped with large-diameter micrometer heads and a 20-micron scale, the MXY63 enables 2-micron motion resolution when manually driven. For enhanced performance, motorized and encoded versions are available, offering even higher resolution and automated control.

    The modular design of the MXY63 allows seamless integration with Boomerax Z-axis modules and rotary platforms, enabling the construction of a complete XYZR manipulator system.

    • 2° adjustable tilt on both flanges for enhanced alignment
    • Adjustable mechanical end stops for precise motion limits
    • Stable, support-free mounting in any orientation
    • Compatible with stepper motors, limit switches, and encoders

    This Boomerax XY Stage is available for direct order through the UHV Store.

    If you're unsure which model is best for your application or have any questions, connect with Ferrovac sales for expert advice.

    Contact

    • Mounting Flange: DN63CF (4.5" OD) tapped M8
    • Travelling Flange: DN40CF (2.75" OD) tapped M6
    • XY Travel Range: ±12.5 mm
    • Free Bore: 65 mm
    • Max. Insert OD: 29 mm

    • Resolution: 2 microns manually (Higher resolution possible with motorized and encoded versions.)
    • Adjustable Tilt: ±2°
    • Adjustable Mechanical End Stops: Yes
    • Bakeout Temperature: 150 °C max.
    • Pressure Range: 1E-11 to 1000 mbar
    • Helium Leak Rate: <1E-10 mbar*l/s

    • Air-Side Lubrication:
      • Spindle: Motorex Type 3000
      • Screws: CRC Dry Lube F 32602-AA
      • Linear Rails: Krytox GPL 225

Boomerax Compatibility