Boomerax Z Stage CF63
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MZ63CF63CF63-ZZZZ

Boomerax Z Stage CF63

From

10’200.00 CHF

Highly precise, heavy-duty linear manipulator.

Questions? Connect with an expertBuy at UHV store

  • The Boomerax Z Stage DN65 is available in the following configurations:

    Product CodeLinear Travel ZFlange TypePrice
    MZ63CF63CF63-0100100mmCF6310200 CHF
    MZ63CF63CF63-0300200mmCF6311100 CHF
    MZ63CF63CF63-0300300mmCF6311900 CHF
    MZ63CF63CF63-0500500mmCF6316500 CHF
    MZ63CF63CF63-0750750mmCF6316900 CHF
    MZ63CF63CF63-10001000mmCF6317800 CHF
    MZ63CF63CF63-12501250mmCF6319800 CHF

    Customization Range with CF63 (Other Flanges Available Upon Request):

    Product CodeLinear Travel ZFlange TypePrice
    MZ63CF63CF63-ZZZZMin. 100mm / Max. 1250mmCF63Contact Ferrovac Sales

    Standard Lengths of this Boomerax Z-Stage are available for direct order through the UHV Store.

    If you're unsure which model is best for your application or have any questions, connect with Ferrovac sales for expert advice.

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  • The Boomerax MZ63 Z-drives offer a robust yet compact design for precise linear motion. High-quality edge-welded bellows ensure leak tightness and durability, meeting all UHV requirements. Both short and long versions of the MZ63 feature a continuous free bore, thanks to the external mounting of the bellows supports.

    Boomerax Z-drives are often integrated with our Boomerax XY-Manipulators and differentially pumped rotary platforms to create complete XYZR manipulator systems.

    • Precision: A motion resolution of 2 microns enable pinpoint Z-axis accuracy and repeatable positioning.
    • Sturdy: Durable, sturdy design capable of handling heavy loads and long travel ranges, while maintaining a compact form.
    • Integration: Complete motion control solutions by combining the Z-stage with readily available Ferrovac XY-stages and rotary platforms for a complete XYZR system.

    • Mounting Flange: DN63CF with through holes for M6 (other flanges available upon request)
    • Traveling Flange: DN63CF with through holes for M6 (other flanges available upon request)
    • Bellows ID: 65 mm

    • Resolution: 5 microns (manual). Higher resolutions achievable with motorized and encoded versions.
    • Transmission: 1:2
    • Helical/Screw gear Unit: 2:1
    • Spindle Pitch: 4 mm

    • Bakeout Temperature: 200 °C max.
    • Pressure Range: 1E-11 to 1000 mbar
    • Helium Leak Rate: <1E-10 mbar*l/s
    • Air-Side Lubrication
      • Spindle: Motorex Type 3000
      • Screws: CRC Dry Lube F 32602-AA
      • Linear Rails: Krytox GPL 225

    Note: The MZ63 requires support with a stand when mounted horizontally.

Boomerax Compatibility